4x4 nonblocking matrix switch based on MOEMS

Laurent Dellmann; Cornel Marxer; Nico F. de Rooij

doi:10.1117/12.404900

20 October 2000 4x4 nonblocking matrix switch based on MOEMS

Laurent Dellmann, Cornel Marxer, Nico F. de Rooij

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404900
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

We present the design and characterization of a new 4 X 4 switch based on the previously developed 2 X 2 fiber switch. The switching principle uses plasma etched vertical mirrors that can be moved in and out of two pairs of optical fibers with the integrated electrostatic actuator. The 4 X 4 switch is built by connecting 16 individual 2 X 2 switches in a common package (100 X 50 X 35 mm). Instead of integrating the 16 switch elements on the same chip, we preferred assembling the switches by fusion splicing. The insertion loss is less than 1.8 dB for each state.

Citation Download Citation

Laurent Dellmann, Cornel Marxer, and Nico F. de Rooij "4x4 nonblocking matrix switch based on MOEMS", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404900

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