Photoelectric soft x-ray multilayer coating thickness control system

Xuan Ming; Bin Chen; Zhi Liu

doi:10.1117/12.401769

5 October 2000 Photoelectric soft x-ray multilayer coating thickness control system

Xuan Ming, Bin Chen, Zhi Liu

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401769
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

This paper introduces a photoelectric soft x-ray multi-layer thickness control system. This paper highlights the operating principle of ion beam sputter coating system, the hardware and software scheme of coating thickness auto- control system.

Citation Download Citation

Xuan Ming, Bin Chen, and Zhi Liu "Photoelectric soft x-ray multilayer coating thickness control system", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401769

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