Performance of a biaxial MEMS-based scanner for microdisplay applications

David W. Wine; Mark P. Helsel; Lorne Jenkins; Hakan Urey; Thor D. Osborn

doi:10.1117/12.396487

22 August 2000 Performance of a biaxial MEMS-based scanner for microdisplay applications

David W. Wine, Mark P. Helsel, Lorne Jenkins, Hakan Urey, Thor D. Osborn

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396487
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Scanned displays have potential for achieving high brightness and see-through configurations in many display applications. A MEMS- based solution based on these tradeoffs for SVGA level performance is presented, with test data illustrating optical, mechanical, and electrical performance. Comparison of this scanner against video requirements and other scanners previously reported are illustrated. The feasibility of MEMS-based scanners for Retinal Scanning Displays and other applications is discussed, with extension to higher video performance standards.

Citation Download Citation

David W. Wine, Mark P. Helsel, Lorne Jenkins, Hakan Urey, and Thor D. Osborn "Performance of a biaxial MEMS-based scanner for microdisplay applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396487

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