Process development and fabrication of application-specific microvalves

Bai Xu; James Castracane; Robert E. Geer; Yahong Yao; Bruce Altemus

doi:10.1117/12.396446

25 August 2000 Process development and fabrication of application-specific microvalves

Bai Xu, James Castracane, Robert E. Geer, Yahong Yao, Bruce Altemus

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396446
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

MEMS promise to revolutionize nearly every product category by bringing together silicon-based microelectronics fabrication with silicon micromachining technology, thereby, making possible the realizing of complete systems-on-a-chip.

Citation Download Citation

Bai Xu, James Castracane, Robert E. Geer, Yahong Yao, and Bruce Altemus "Process development and fabrication of application-specific microvalves", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396446

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available