Industrial aspects of Nd-YAG laser microprocessing

Yash P. Kathuria

doi:10.1117/12.413743

30 January 2001 Industrial aspects of Nd-YAG laser microprocessing

Yash P. Kathuria

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413743
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

For the last decade processing application with the Nd:YAG laser operating int eh UV, visible and IR region has taken a new dynamic turn in the micro technology. It has covered a wide range of applications in microelectronics, semiconductors and screen printing as well as in the medical industries. From laser ablation to marking and from precision cutting to micro welding, it has opened a new horizon of industrial needs in micro technology. Of these, processing with the UV radiations have a unique characteristics of ablation and allow the production of small micrometers order microstructures, but their industrial application has yet to be established. On the contrary, processing with the IR radiations usually considered as thermal processing covers mainly precision cutting of stencil mask for screen printing technology, micro processing of metallic stents for medical therapy and various other microstructuring applications. In all these processes, due to different scale length of the beam interaction time with the material, various physical phenomenon are encountered that ultimately affect the quality of the end product. The present paper elaborates a few of these basic processes and explores the possibilities of current and new application areas.

Citation Download Citation

Yash P. Kathuria "Industrial aspects of Nd-YAG laser microprocessing", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413743

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available