Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence

Zhanshan Wang; Changjun Kun; Yueying Ma; Bin Chen; Jianlin Cao; Zhuying Zhou; Xingdan Chen; Alan G. Michette

doi:10.1117/12.406660

8 November 2000 Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence

Zhanshan Wang, Changjun Kun, Yueying Ma, Bin Chen, Jianlin Cao, Zhuying Zhou, Xingdan Chen, Alan G. Michette

Author Affiliations +

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406660
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A method of designing multilayers with broadband wavelength responses for use as coatings in EUV optics at normal incidence is presented int his paper. The method is based on the well-known Fresnel equations and recursive calculation combined with a defined merit function, with random variation of the thickness of each layer. This allows the design of multilayers for specific requirements. The method was used to design Mo/Si multilayers with broadband wavelength responses for the EUV region, 18 - 20 nm. Such mirrors were made by magnetron sputtering in 99.99% pure argon. The deposition rates, after calibration, were 0.12 nms^-1 for molybdenum and 0.07 nms^-1 for silicon. The broadband multilayers were deposited on 30 mm diameter K9 glass substrates with rms surface roughnesses less than 0.8 nm.

Citation Download Citation

Zhanshan Wang, Changjun Kun, Yueying Ma, Bin Chen, Jianlin Cao, Zhuying Zhou, Xingdan Chen, and Alan G. Michette "Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406660

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available