Bias voltage dependence of sp3 fractions of amorphous carbon films prepared by magnetically filtered carbon ion deposition studied by spectroscopic ellipsometry

Wensheng Guo

doi:10.1117/12.408329

29 November 2000 Bias voltage dependence of sp3 fractions of amorphous carbon films prepared by magnetically filtered carbon ion deposition studied by spectroscopic ellipsometry

Wensheng Guo

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Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408329
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Amorphous carbon films (a-C) attract much attention for years because of its unique properties. However, its properties strongly depend on the preparation conditions. The determination of the sp³-bonded carbon fractions is very crucial. In this paper, a series of a-C films have been prepared on silicon substrates with different bias voltages using magnetic filtered carbon ion deposition. Spectroscopic ellipsometry (SE) has been applied to study these samples over the VIS-NIR spectral range. during the analysis of the measured ellipsometry data, Forouhi and Bloomer model, which was shown to be appropriate for amorphous diamond-like carbon films, is firstly applied to describe a-C films. The thickness and optical constants of a-C films can be obtained. Because our object is to directly determine the sp³-bonded carbon fractions, ia mixed composition film including sp³, sp² components is assumed to represent the a-C films. Comparison of deduced values from these two models will be given. In order to verify the SE results, results obtained from optical absorption measurements have also been given and compared.

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Wensheng Guo "Bias voltage dependence of sp3 fractions of amorphous carbon films prepared by magnetically filtered carbon ion deposition studied by spectroscopic ellipsometry", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408329

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KEYWORDS

Carbon

Statistical analysis

Absorption

Ions

Spectroscopic ellipsometry

Error analysis

Data modeling

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