Compliant MEMS: design methods and applications

Sridhar Kota

doi:10.1117/12.382272

10 April 2000 Compliant MEMS: design methods and applications (Abstract Only)

Sridhar Kota

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382272
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

A systematic method of synthesis of monolithic mechanical structures called compliant mechanisms is presented. Sophisticated mechanical functions can be realized with these mechanisms and their unitized construction eliminates joint friction, clearances, and the need for assembly.

Citation Download Citation

Sridhar Kota "Compliant MEMS: design methods and applications (Abstract Only)", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382272

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KEYWORDS

Microelectromechanical systems

Packaging

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