Lossless layout compression for maskless lithography systems

Vito Dai; Avideh Zakhor

doi:10.1117/12.390085

21 July 2000 Lossless layout compression for maskless lithography systems

Vito Dai, Avideh Zakhor

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390085
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Future lithography systems must produce more dense chips with smaller feature sizes, while maintaining throughput comparable to today's optical lithography systems. This places stringent data-handling requirements on the design of any maskless lithography system. Today's optical lithography systems transfer one layer of data from the mask to the entire wafer in about sixty seconds. To achieve a similar throughput for a direct-write maskless lithography system with a pixel size of 25 nm, data rates of about 10 Tb/s are required. In this paper, we propose an architecture for delivering such a data rate to a parallel array of writers. In arriving at this architecture, we conclude that pixel domain compression schemes ar essential for delivering these high data rates. To achieve the desired compression ratios, we explore a number of binary lossless compression algorithms, and apply them to a variety of layers of typical circuits such as memory and control. The algorithms explored include the Joint Bi-Level Image Processing Group (JBIG), Ziv-Lempel (LZ77) as implemented by ZIP, as well as our own extension of Ziv-Lempel to two-dimensions. For all the layouts we tested, at least one of the above schemes achieves a compression ratio of 20 or larger, demonstrating the feasibility of the proposed system architecture.

Citation Download Citation

Vito Dai and Avideh Zakhor "Lossless layout compression for maskless lithography systems", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390085

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available