Coulomb image distortion in charge particle projection systems: scattering function of arbitrary image point

Boris G. Freinkman

doi:10.1117/12.390109

21 July 2000 Coulomb image distortion in charge particle projection systems: scattering function of arbitrary image point

Boris G. Freinkman

Author Affiliations +

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390109
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The paper looks into the applicability of two models of Coulomb interactions -- space charge interaction and two particles interaction -- for image distortion calculations in the SCALPEL projection system. In contrast to [1-3], the paper takes into consideration the electron beam structure which is determined by the image structure, focus and astigmatism conditions. The calculations show that with the increasing electron current the space charge interaction becomes stronger than two particle interactions. In a qualitative sense spherical aberrations caused by Coulomb interactions are the same in the both models. The inference is that a Coulomb decrease in resolution in this particular system is largely due to space charge interactions. The calculations of the central point spread show that the resolution can be increased several times by correctly choosing the location of the image plane. With the beam energy of 100 kV and current of 50 (mu) A the highest resolution is 25 nm.

Citation Download Citation

Boris G. Freinkman "Coulomb image distortion in charge particle projection systems: scattering function of arbitrary image point", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390109

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