Optical sources, integrated optical detectors, and optical waveguides in standard silicon CMOS integrated circuitry

Lukas Willem Snyman; Herzl Aharoni; Alice Biber; Alfons Bogalecki; Lyndsay Canning; Monuko du Plessis; Petrus Maree

doi:10.1117/12.379613

15 March 2000 Optical sources, integrated optical detectors, and optical waveguides in standard silicon CMOS integrated circuitry

Lukas Willem Snyman, Herzl Aharoni, Alice Biber, Alfons Bogalecki, Lyndsay Canning, Monuko du Plessis, Petrus Maree

Author Affiliations +

Proceedings Volume 3953, Silicon-based Optoelectronics II; (2000) https://doi.org/10.1117/12.379613
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

A series of light emitting devices were designed and realized with a standard 2 micron CMOS technology, 1.2 micron CMOS technology and 0.8 micron Bi-CMOS integrated circuit fabrication technology. The devices operated in the reverse breakdown avalanche mode, at voltage levels of 8 - 20 V and in the current range 80 (mu) A - 10 mA. The devices emit visible light in the 450 - 750 nm wavelength region at intensity levels of up to 1 nWmicrometers ^-2 (10 mW.cm^-2). A series of optimized optical detectors were developed using the same technologies in order to detect lateral and glancing incidence visible and infrared radiation optimally. A series of waveguiding structures of up to 100 micron in length were designed and realized with CMOS technologies by utilizing the field oxide, the inter- metallic oxides and the aluminum metal layers as construction elements. Signal levels ranging from 60 nA to 1 micro-amperes could be detected at the detectors of waveguiding structures of up to 100 micron in length. Finally, a complete optoelectronic integrated circuit was designed and simulated with 0.8 micron Bi-CMOS technology with some of the developed light sources, detectors, waveguiding structures and added driving and amplification circuitry. In particular a very powerful high gain wide- bandwidth MOSFET signal amplifiers was developed that could be successfully integrated in the optoelectronic integrated circuit. The developed technologies show potential for application of optoelectronic circuits in next generation silicon CMOS integrated circuits.

Citation Download Citation

Lukas Willem Snyman, Herzl Aharoni, Alice Biber, Alfons Bogalecki, Lyndsay Canning, Monuko du Plessis, and Petrus Maree "Optical sources, integrated optical detectors, and optical waveguides in standard silicon CMOS integrated circuitry", Proc. SPIE 3953, Silicon-based Optoelectronics II, (15 March 2000); https://doi.org/10.1117/12.379613

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available