Infrared vision using uncooled optomechanical camera

Arunava Majumdar; M. Mao; Thomas M. Perazzo; Yang Zhao; O. Kwon; John B. Varesi; Paul Norton

doi:10.1117/12.382146

13 April 2000 Infrared vision using uncooled optomechanical camera

Arunava Majumdar, M. Mao, Thomas M. Perazzo, Yang Zhao, O. Kwon, John B. Varesi, Paul Norton

Proceedings Volume 3948, Photodetectors: Materials and Devices V; (2000) https://doi.org/10.1117/12.382146
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

An uncooled IR imaging system that is based on thermomechanical sensing of IR radiation in conjunction with a visible optical readout has been developed. The system contains a focal plane array (FPA) consisting of bimaterial cantilever beams made of silicon nitride (SiN_x) and gold (Au) in each pixel. Absorption on incident IR radiation in the 8-14 micrometers wavelength range by SiN_x in each cantilever beam raises its temperature, resulting in proportional deflection due to mismatch in thermal expansion of the two cantilever materials. The FPA design involved maximizing the thermal resistance between the pixel and its surroundings, maximizing the thermomechanical response within the constraints of the pixel size, optimizing the pixel time response, and maximizing the IR absorption using thin film optics. Microfabrication of stress-balanced bimaterial cantilevers was achieved by varying the silicon concentration along the thickness of the SiN_x films in order to balance the residual tensile stress in the Au film and the Cr adhesion layer between Au and SiN_x. The optical readout utilized Fourier diffractive optics to simultaneously detect deflections of all cantilevers using a single light source. The results suggest that objects at temperatures as low as 30 degrees C can be imaged with the best noise-equivalent temperature difference (NETD) in the range of 2-5 K. It is estimated that further improvements that are currently being pursed can improved NETD below 5 mK.

Citation Download Citation

Arunava Majumdar, M. Mao, Thomas M. Perazzo, Yang Zhao, O. Kwon, John B. Varesi, and Paul Norton "Infrared vision using uncooled optomechanical camera", Proc. SPIE 3948, Photodetectors: Materials and Devices V, (13 April 2000); https://doi.org/10.1117/12.382146

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available