Studies Of Fabrication Parameters Of Textured Storage Media

L, M. Schiavone; H. G. Craighead; R. E. Howard; J. L. Shay

doi:10.1117/12.935054

20 September 1982 Studies Of Fabrication Parameters Of Textured Storage Media

L, M. Schiavone, H. G. Craighead, R. E. Howard, J. L. Shay

Proceedings Volume 0390, High Speed Read/Write Techniques for Advanced Printing and Data Handling; (1982) https://doi.org/10.1117/12.935054
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

This paper describes the changes in morphology of microscopically textured germanium as a function of the fabrication parameters. A technique of sputtering aluminum from the upper electrode to provide uniform mask formation over the surface is described. This process allows fabrication of much larger area textured surfaces than was possible using previous techniques.

Citation Download Citation

L, M. Schiavone, H. G. Craighead, R. E. Howard, and J. L. Shay "Studies Of Fabrication Parameters Of Textured Storage Media", Proc. SPIE 0390, High Speed Read/Write Techniques for Advanced Printing and Data Handling, (20 September 1982); https://doi.org/10.1117/12.935054

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