Programmable MEMS capacitor arrays

Bruce E. Duewer; John M. Wilson; David A. Winick; Paul D. Franzon

doi:10.1117/12.368433

8 October 1999 Programmable MEMS capacitor arrays

Bruce E. Duewer, John M. Wilson, David A. Winick, Paul D. Franzon

Proceedings Volume 3893, Design, Characterization, and Packaging for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.368433
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

We describe a programmable capacitor technology under development at NCSU and its potential application in building programmable interconnect devices useful for system level connectivity functions, phased array beam steering, and RF switching. Crossbars are made from arrays of electrostatically controlled bistable MEMS-based capacitors. These new devices allow faster signaling and consume less power than BiCMOS crossbars. They also allow critical RF components to be shrinked in size substantially. We describe the essential elements of these arrays and present results obtained so far.

Citation Download Citation

Bruce E. Duewer, John M. Wilson, David A. Winick, and Paul D. Franzon "Programmable MEMS capacitor arrays", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); https://doi.org/10.1117/12.368433

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