Metal-fill optical test structures for improved chemical mechanical polishing

Shadi Alex AbuGhazaleh; Phillip Christie

doi:10.1117/12.361356

27 August 1999 Metal-fill optical test structures for improved chemical mechanical polishing

Shadi Alex AbuGhazaleh, Phillip Christie

Proceedings Volume 3884, In-Line Methods and Monitors for Process and Yield Improvement; (1999) https://doi.org/10.1117/12.361356
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

This paper presents an iterative algorithm that merges the physical layout of a circuit with an optical test structure called a wire segment hologram. Wire segment holograms are geometrical patterns that resemble circuit wiring but are arranged to project an holographic image when illuminated with a light source whose wavelength is comparable to the feature size of the process under test. The quality of the projected image is strongly correlated with the fidelity of the fabrication process and therefore provides rapid, non-contact, dimensional metrology. We propose that the merged circuit/test structure is ideal for metal processing which suffers from high pattern dependence, such as chemical mechanical polishing. By changing the relative width, height and pitch of the merged diffractive elements, it is possible to generate test structures with a wide range of metal density. Thus, these test structures can perform the dual task of reducing pattern dependent defect formation and characterizing the dimensional fidelity of the fabrication process. Initial results are presented that indicate the merged circuit/test structures can resolve mask offset variations as small as 0.1 micrometer for a 2 micrometer wire width.

Citation Download Citation

Shadi Alex AbuGhazaleh and Phillip Christie "Metal-fill optical test structures for improved chemical mechanical polishing", Proc. SPIE 3884, In-Line Methods and Monitors for Process and Yield Improvement, (27 August 1999); https://doi.org/10.1117/12.361356

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available