Reliability issues of COTS MEMS for aerospace applications

Rajeshuni Ramesham; Reza Ghaffarian; Namsoo P. Kim

doi:10.1117/12.359357

18 August 1999 Reliability issues of COTS MEMS for aerospace applications

Rajeshuni Ramesham, Reza Ghaffarian, Namsoo P. Kim

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359357
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes. For example, accelerometers are widely used for air bag in automobile and pressure sensors for various industrial applications. Some of the MEMS devices have potential to become the commercial- off-the-shelf (COTS) components. While high reliability applications including aerospace require much more sophisticated technology development, they would achieve significant cost savings if they could utilize COTS components in their systems. This paper reviews the current status of MEMS packaging technology from COTS to specific application provides lessons learned, and finally, identifies a need for a systematic approach for this purpose.

Citation Download Citation

Rajeshuni Ramesham, Reza Ghaffarian, and Namsoo P. Kim "Reliability issues of COTS MEMS for aerospace applications", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359357

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available