Integration issues for pressure sensors

Bishnu P. Gogoi; David J. Monk; Theresa Maudie; Todd F. Miller; Jose Torres

doi:10.1117/12.361220

30 August 1999 Integration issues for pressure sensors

Bishnu P. Gogoi, David J. Monk, Theresa Maudie, Todd F. Miller, Jose Torres

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361220
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

This paper looks at the issues related to the integration of pressure sensors with the control circuit necessary to achieve the demands of increased performance measured by such parameters as linearity, resolution, accuracy and temperature sensitivity. In addition, the media in which these devices are used can influence the performance considerably with attendant offsets and drifts. Results of the effects of the media exposure on capacitive pressure sensors are presented. The motivation for integrating the sensor with the control circuit is then discussed with respect to these experimental results.

Citation Download Citation

Bishnu P. Gogoi, David J. Monk, Theresa Maudie, Todd F. Miller, and Jose Torres "Integration issues for pressure sensors", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361220

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