Proposed successor to barcode for automated reticle identification

Thomas White; Winthrop A. Baylies; Karl Andrew Bernal; John Merva; William Bouvier

doi:10.1117/12.373380

30 December 1999 Proposed successor to barcode for automated reticle identification

Thomas White, Winthrop A. Baylies, Karl Andrew Bernal, John Merva, William Bouvier

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373380
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

Automated reticle identification faces new challenges as the industry approaches the arrival of 300 mm wafer fabs and the possible introduction of 230 mm reticles. Data Matrix is a useful and established encoding format, and is proposed as a successor to current barcode formats. The Data Matrix feasibility experiment is described and results discussed.

Citation Download Citation

Thomas White, Winthrop A. Baylies, Karl Andrew Bernal, John Merva, and William Bouvier "Proposed successor to barcode for automated reticle identification", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373380

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