Evaluation of lens aberrations depending on the transmittance of DUV-attenuated PSM

JoHyun Park; Yong-Hoon Kim; Sung-Chul Lim; Kyung Hee Lee; Seong-Woon Choi; Hee-Sun Yoon; Jung-Min Sohn

doi:10.1117/12.373385

30 December 1999 Evaluation of lens aberrations depending on the transmittance of DUV-attenuated PSM

JoHyun Park, Yong-Hoon Kim, Sung-Chul Lim, Kyung Hee Lee, Seong-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373385
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

The effect of lens aberration in projection system is simulated for 0.2 micrometer isolated contact holes and 0.2 micrometer line/space patterns with conventional binary mask, 5% and 20% attenuated phase-shift-mask. The spherical aberration affects CD variation through focus on the 0.2 micrometer isolated contact holes for a 20% attenuated phase- shift-mask. Phase compensation is needed to minimize the CD variation. Line/space patterns are found to be insensitive to the spherical aberration. The comatic aberration is harmful for features as small as 0.2 micrometer line/space pairs. To satisfy the tolerance of 30 nm CD difference, the comatic aberration must be less than 0.05 (lambda) . The effect of astigmatism is negligible compared to the comatic aberration.

Citation Download Citation

JoHyun Park, Yong-Hoon Kim, Sung-Chul Lim, Kyung Hee Lee, Seong-Woon Choi, Hee-Sun Yoon, and Jung-Min Sohn "Evaluation of lens aberrations depending on the transmittance of DUV-attenuated PSM", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373385

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available