Beta test performance of the Leica LWM 250 UV CD measurement tool

Robert K. Henderson

doi:10.1117/12.373305

30 December 1999 Beta test performance of the Leica LWM 250 UV CD measurement tool

Robert K. Henderson

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373305
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

This paper contains data and conclusions reached during a beta test of the Leica 250 UV CD measurement tool conducted in early 1999 at DuPont Photomasks' Reticle Technology Center. The tool was evaluated primarily for final CD measurement focusing specifically on tool accuracy and precision in the measurement of a variety of feature types in both I-line and broadband transmitted light. Tool resolution, screen linearity, induced systematic error, and measurement speed were also given some consideration. Comments on the general usability of the tool are also provided.

Citation Download Citation

Robert K. Henderson "Beta test performance of the Leica LWM 250 UV CD measurement tool", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373305

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