Fast-steering two-axis tilt mirror for laser pointing and scanning

Moustapha Hafez; Thomas C. Sidler

doi:10.1117/12.357822

18 August 1999 Fast-steering two-axis tilt mirror for laser pointing and scanning

Moustapha Hafez, Thomas C. Sidler

Proceedings Volume 3834, Microrobotics and Microassembly; (1999) https://doi.org/10.1117/12.357822
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

Compact fast-steering two axis-tilt mirrors are key components in astronomy, laser communications, material processing applications, imaging systems, biomedical and ophthalmologic applications. The laser scanner presented in this paper can perform a variety of functions such as tracking, beam stabilization and alignment, pointing and scanning. The small overall volume of 30 X 40 X 50 mm³ can lead to a very stable and compact system design. The fact that the steered mirror has a single point of rotation for the two tilt axes is a clear advantage for systems with scanning lenses designed for this purpose. The scanner is composed of one single mirror driven by two pairs of push-pull linear electromagnetic actuators. The suspension of the mirror is based on a cone-ball bearing with optimized friction and wear behavior. A Position Sensitive Detector integrated in the module is used for the closed loop feedback positioning. The mirror can be tilted by more than +/- 52 mrad (+/- 3 degree(s)) with an accuracy better than 50 (mu) rad. A differential resolution of the order of 5 (mu) rad and a settling time for maximum deflection of 9 ms is achieved. Due to the large active area of the mirror (30 mm X 40 mm), very small spot diameters can be reached (less than 1 micrometers ) using high quality laser beams. Therefore, the scanner can be used e.g. in high precision micro-material processing of semiconductor and sensor industry.

Citation Download Citation

Moustapha Hafez and Thomas C. Sidler "Fast-steering two-axis tilt mirror for laser pointing and scanning", Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); https://doi.org/10.1117/12.357822

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