Multichannel sensors in thin film technology

Helmut Stiebig; Patrick G. Herzog; Dietmar Knipp; Friedhelm Koenig

doi:10.1117/12.364311

16 September 1999 Multichannel sensors in thin film technology

Helmut Stiebig, Patrick G. Herzog, Dietmar Knipp, Friedhelm Koenig

Proceedings Volume 3826, Polarization and Color Techniques in Industrial Inspection; (1999) https://doi.org/10.1117/12.364311
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

A novel sensor concept for the detection of the fundamental components of visible light has been developed. The multi- channel sensors (3-, 4- and 6-channel detectors) based on three and four stacked amorphous thin film detectors are color moire or color aliasing free due to their vertical integration. The color separation is performed in the depth of the structure without using optical filters. The developed 3- and 4-channel detectors can be read-out with one shot whereas the color information of the 6-channel detector can be read- out with two shots. The sensors are colorimetrically characterized in order to gain further optimization criteria concerning the improvement of the sensor performance. The presented characterization model facilitates the quantification of color errors with regard to the human perception. Furthermore, the color errors of amorphous thin film sensors are compared with a commercial color CCD camera and a BiCMOS color-sensor.

Citation Download Citation

Helmut Stiebig, Patrick G. Herzog, Dietmar Knipp, and Friedhelm Koenig "Multichannel sensors in thin film technology", Proc. SPIE 3826, Polarization and Color Techniques in Industrial Inspection, (16 September 1999); https://doi.org/10.1117/12.364311

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KEYWORDS

Sensors

Diodes

CCD image sensors

Absorption

Thin films

Electronics

CCD cameras

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