Tolerancing and testing of CGH aspheric nulls

Eugene O. Curatu; Min Wang

doi:10.1117/12.369208

11 November 1999 Tolerancing and testing of CGH aspheric nulls

Eugene O. Curatu, Min Wang

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369208
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

In this paper we discuss the results given by the nominal design, tolerance analysis, and tests of aspheric CGH null. The optical testing configuration has been used contained a Zygo interferometer, a self-alignment CGH null and a convex aspheric surface under test with revolution symmetry. The CGH null design has been carried out while taking into consideration the parameters of the test surface such as focal ratio, axial coordinates of the test surface normal as function of radial height, as well as the diffractive technology limits. The worst case generated by Monte Carlo analysis of the tolerance has been used to determine the photolithography tolerances. Finally the CGH null testing results are compared with the nominal design and tolerance analysis predictions.

Citation Download Citation

Eugene O. Curatu and Min Wang "Tolerancing and testing of CGH aspheric nulls", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369208

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