Laser alignment for 610-mm large-aperture Fizeau interferometer

Sen Han

doi:10.1117/12.369226

11 November 1999 Laser alignment for 610-mm large-aperture Fizeau interferometer

Sen Han

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369226
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Veeco Metrology has designed and built 7 large aperture Fizeau interferometers. In these interferometers light sources need to have a selectable polarization to be either vertical or horizontal. Therefore, the method of whole light source rotation was selected. However, the assembly of whole light source needs to take time to ensure the intensity center of diode laser coincides with mechanical rotation axis. This paper describes another possible method for the laser alignment in a 610-mm large aperture Fizeau interferometer using a half-wave plate. This method is easy to align and is an option in the future. But because of time limit and cost problem we used the method of whole light source rotation in past 7 interferometers. In this paper experiments and simulated calculations were finished.

Citation Download Citation

Sen Han "Laser alignment for 610-mm large-aperture Fizeau interferometer", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369226

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