Diffractive near-field array generators

Werner Klaus; Ayako Okazaki; Haruka Suzuki; Tomoko Nakayama; Kashiko Kodate

doi:10.1117/12.354887

19 July 1999 Diffractive near-field array generators

Werner Klaus, Ayako Okazaki, Haruka Suzuki, Tomoko Nakayama, Kashiko Kodate

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354887
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

In this paper, we compare and summarize the features of two types of 2D array illuminators--the binary zone plate array and the Talbot array illuminator--both producing a spot array in the near field without the addition of any optical component. Numerical evaluations of the illumination efficiency are based on the scalar theory. We present and discuss furthermore the experimental results obtained by such array illuminators when fabricated under the same conditions, i.e., by optical lithography and two masks (four-level binary optics).

Citation Download Citation

Werner Klaus, Ayako Okazaki, Haruka Suzuki, Tomoko Nakayama, and Kashiko Kodate "Diffractive near-field array generators", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354887

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