Height gauging by wavelength-scanning interferometry with phase detection

Jun-ichi Kato; Ichirou Yamaguchi

doi:10.1117/12.347753

7 May 1999 Height gauging by wavelength-scanning interferometry with phase detection

Jun-ichi Kato, Ichirou Yamaguchi

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347753
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

We have realized an accurate step height measurement by using the wavelength scanning interferometry combined with phase- shifting technique. It is based on detection of phase variation slope along the wavenumber axis at each pixel of a CCD camera taking a number of interferograms at different wavelengths and phases. By using a tunable laser diode with wavelength-scanning range of approximately 8 nm, a height deviation of sub-micrometer could be measured by using a PZT phase-shifter. This technique was applied to a height gauging of the gold bump array.

Citation Download Citation

Jun-ichi Kato and Ichirou Yamaguchi "Height gauging by wavelength-scanning interferometry with phase detection", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347753

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