Linear and nonlinear optical properties of silicon micro- and nanocrystallites

Dmitri Milovzorov; Takao Inokuma; Yoshihiro Kurata; Seiichi Hasegawa; Takanori Suzuki

doi:10.1117/12.342366

15 March 1999 Linear and nonlinear optical properties of silicon micro- and nanocrystallites

Dmitri Milovzorov, Takao Inokuma, Yoshihiro Kurata, Seiichi Hasegawa, Takanori Suzuki

Proceedings Volume 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures; (1999) https://doi.org/10.1117/12.342366
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation

Abstract

Silicon crystallites produced by low temperature plasma- enhanced chemical vapor deposition technique have been shown size-dependent photoluminescent and second harmonic generation responses. The crystalline volume fraction was estimated by using Raman spectra. The grain sizes of crystallites were measured by using x-ray diffraction. The structural chemical properties of poly-Si films were studied by means of Fourier-transform infrared spectroscopy and transmission spectrophotometry. The size- and shape- dependent second-harmonic generation of poly-Si films is, also, studied. The second-harmonic generation intensity for poly-Si deposited by using SiH₄/SiF₄/H₂ gas mixture as function of such deposition conditions as hydrogen flow rate, silicon tetrafluoride flow rate, deposition temperature was studied.

Citation Download Citation

Dmitri Milovzorov, Takao Inokuma, Yoshihiro Kurata, Seiichi Hasegawa, and Takanori Suzuki "Linear and nonlinear optical properties of silicon micro- and nanocrystallites", Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); https://doi.org/10.1117/12.342366

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