Paper
30 April 1999 Generation model of a transducer with the membrane ultrasonic sensor as a delay line
Author Affiliations +
Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346836
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland
Abstract
The interdigital piezoelectric transducers are used in the microsize membrane silicon sensors to the generation and detection of the ultrasonic wave. The wave generation and propagation depend on some external factors, and as a result the wave amplitude as well as the phase velocity of the propagation change. The system of the membrane sensor with ultrasonic wave Lambda type can be examined as a delay line. The application of the membrane sensors as a delay line which works in the generator close loop was presented. The equivalent circuit of the generator with the sensor was analyzed by means of the SPICE program.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jacek Golebiowski "Generation model of a transducer with the membrane ultrasonic sensor as a delay line", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); https://doi.org/10.1117/12.346836
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KEYWORDS
Sensors

Amplifiers

Transducers

Ultrasonics

Chemical elements

Wave propagation

Silicon

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