Dynamic model reduction for control of molecular beam expitaxy

David Kan

doi:10.1117/12.350135

4 June 1999 Dynamic model reduction for control of molecular beam expitaxy

David Kan

Proceedings Volume 3667, Smart Structures and Materials 1999: Mathematics and Control in Smart Structures; (1999) https://doi.org/10.1117/12.350135
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

One important component in the development of many smart structures and microdevices is the growth of thin films. The control of the growth processes, therefore, is of interest. In the design of a control system for molecular beam epitaxy (MBE), it is important to have simple mathematical models that describe the different growth morphologies that a growing film may exhibit and incorporate atomic-scale information. Of the three types of models currently being considered (atomistic, continuum, and bulk), bulk models have the most interest to control. Still, due to the complexity of such models, however, a model reduction must be carried out to make real-time control possible. A model reduction routine based on a new version of the nonlinear Galerkin methods is proposed and explained for three different bulk models. A total reduction of one-third the number differential equations is obtained.

Citation Download Citation

David Kan "Dynamic model reduction for control of molecular beam expitaxy", Proc. SPIE 3667, Smart Structures and Materials 1999: Mathematics and Control in Smart Structures, (4 June 1999); https://doi.org/10.1117/12.350135

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