Optimal method for fabrication of gradient dichroic mirrors without mask

Rung-Ywan Tsai; Sen Chrong Shiau; Tzu-Shin Chen

doi:10.1117/12.349363

20 May 1999 Optimal method for fabrication of gradient dichroic mirrors without mask

Rung-Ywan Tsai, Sen Chrong Shiau, Tzu-Shin Chen

Proceedings Volume 3634, Projection Displays V; (1999) https://doi.org/10.1117/12.349363
Event: Electronic Imaging '99, 1999, San Jose, CA, United States

Abstract

Gradient dichroic mirrors consisting 25 alternating layers of TiO₂ and SiO₂ were prepared by reactive electron beam deposition at a glass-substrate temperature of 300 degrees C in a home made planetary planar coating system without mask. Samples with the various tilt angles from the rotating axis were hanged on the edge of four specially designed hollow planets. The thickness variation for a single layer SiO₂ over a planet of 16 cm diameter at the height of 60 cm was less than 3 percent. This coating system was very suitable for the coating of gradient dichroic mirrors with large area showing the consistent color performance with various incident angles across the mirror surface.

Citation Download Citation

Rung-Ywan Tsai, Sen Chrong Shiau, and Tzu-Shin Chen "Optimal method for fabrication of gradient dichroic mirrors without mask", Proc. SPIE 3634, Projection Displays V, (20 May 1999); https://doi.org/10.1117/12.349363

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