Paper
1 June 1999 New diffractive continuous phase relief element optimization method: an application to a flat top generator
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Abstract
Diffractive Continuous Phase Relief Elements are very attractive due to the high efficiency reachable and to the good replication capacities. Unfortunately standard optimization techniques usually generate discontinuous phase relief elements. In this paper we propose a new design method based on a multi-dimensional parameters optimization. The algorithm leads to a parametric optimization according to a merit function wholly defined by user. We report on the theory and the development of this method, illustrating the results obtained through the example of a flattop generator.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Kopp, Bernard C. Kress, and Patrick Meyrueis "New diffractive continuous phase relief element optimization method: an application to a flat top generator", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); https://doi.org/10.1117/12.349320
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KEYWORDS
Manufacturing

Chemical elements

Optimization (mathematics)

Diamond

Optical lithography

Excimer lasers

Laser ablation

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