Novel method for fabricating 3D helical THz antennas directly on semiconductor substrates

Robert N. Dean Jr.; Paul C. Nordine; Christos G. Christodoulou

doi:10.1117/12.347110

29 April 1999 Novel method for fabricating 3D helical THz antennas directly on semiconductor substrates

Robert N. Dean Jr., Paul C. Nordine, Christos G. Christodoulou

Proceedings Volume 3617, Terahertz Spectroscopy and Applications; (1999) https://doi.org/10.1117/12.347110
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

The fabrication of 3D helical antennas, designed for the low THz frequency range, will allow for the efficient transmission and reception of circularly polarized radiation. This paper presents a novel method of fabricating helical antennas, singular and arrayed, for the low THz frequency range. The THz antenna structures are fabricated by using Laser Chemical Vapor Deposition (LCVD) to form fibers that can be grown into complex 3D structures directly on semiconductor substrates. By focusing the laser through a diffractive optic, arrays of antennas can be fabricated at the same time. THz radiation detection devices can be realized by combining the LCVD antennas with MEMS micro- bolometers that convert received THz radiation into a change in resistance. Arrays of these antenna-bolometer pairs can be fabricated on the same substrate to realize a THz imaging device.

Citation Download Citation

Robert N. Dean Jr., Paul C. Nordine, and Christos G. Christodoulou "Novel method for fabricating 3D helical THz antennas directly on semiconductor substrates", Proc. SPIE 3617, Terahertz Spectroscopy and Applications, (29 April 1999); https://doi.org/10.1117/12.347110

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available