Laser polarization superresolution in surface microscopy

Oleg V. Angelsky; Alexander G. Ushenko; Serhiy B. Yermolenko

doi:10.1117/12.324575

19 August 1998 Laser polarization superresolution in surface microscopy

Oleg V. Angelsky, Alexander G. Ushenko, Serhiy B. Yermolenko

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.324575
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

New possibilities for measurement of slightly-rough surfaces provided by usage of polarization optics in modern interference measuring devices are considered.

Citation Download Citation

Oleg V. Angelsky, Alexander G. Ushenko, and Serhiy B. Yermolenko "Laser polarization superresolution in surface microscopy", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.324575

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