Laser synthesis of nano powders of Si-based nitrides and carbides

Yong Liang; Zhengang Wu; Fen Zheng; Quanggang Xian; Zhongchao Feng

doi:10.1117/12.317900

15 August 1998 Laser synthesis of nano powders of Si-based nitrides and carbides

Yong Liang, Zhengang Wu, Fen Zheng, Quanggang Xian, Zhongchao Feng

Proceedings Volume 3550, Laser Processing of Materials and Industrial Applications II; (1998) https://doi.org/10.1117/12.317900
Event: Photonics China '98, 1998, Beijing, China

Abstract

Amorphous Si₃N₄, Si/N/C and crystalline SiC nano- powders, 5 - 50 nm in mean diameter, with yields of 250 g/h were synthesized via laser induced gas phase reactions flow cost hexamethyldisilazane (HMDS) and NH₃ (or H₂). Reaction flame temperatures, which were controlled by the total gas flow rate, greatly influenced powder composition and crystallinity. Amorphous Si₃N₄ powders (96 wt%) were obtained at 1000 degrees Celsius flow HMDS + NH₃; (beta) -SiC (93 wt%) was formed at 1600 degrees Celsius with H₂. Amorphous Si/N/C powders with various N/C ratios (0.1 - 6) were synthesized at various temperatures. The main impurities in the powders were the organo-ligands such as NH_x and CH_x (X equals 1 - 3) whose existence also resulted in a strong surface absorption of oxygen. Commercial production technologies of above mentioned powders were also stated.

Citation Download Citation

Yong Liang, Zhengang Wu, Fen Zheng, Quanggang Xian, and Zhongchao Feng "Laser synthesis of nano powders of Si-based nitrides and carbides", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); https://doi.org/10.1117/12.317900

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