Fundamentals of the advanced Fresnel tracer used for two-dimensional in-process micromeasurements

Burkhard Huhnke; Gunnar Urbschat

doi:10.1117/12.334328

29 December 1998 Fundamentals of the advanced Fresnel tracer used for two-dimensional in-process micromeasurements

Burkhard Huhnke, Gunnar Urbschat

Proceedings Volume 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV; (1998) https://doi.org/10.1117/12.334328
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

The drive to short development times and closed-loop process control has created a demand for new tools to collect the needed dimensional data. Optical technologies in fields such as sensors, signal processing, metrology, and instrumentation offer unique solutions to many areas of monitoring, diagnostics and control. The Advanced Fresnel Tracer (AFT), an innovative instrumentation for in-process micromeasurement consisting of a smart optical sensors and an automatic follow-up system, based on a temperature controlled grated glass scale or interferometer will be presented. This device may readily be integrated into a turning or grinding machine, e.g. for the needs of quality assurance and to enable an on-line automatic compensation of diameter deviations/1/2. The device contains an optical Fresnel diffraction sensor allowing a fast measurement of the surface topography, achieving three goals: 1) improvement of the instantaneous diameter measurement, 2) surface quality inspection, and 3) determination of the edge gradient or the waviness of the workpiece. The new compact, smart, and precise optical multiparamter sensor, the AFT has been developed and tested.

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Burkhard Huhnke and Gunnar Urbschat "Fundamentals of the advanced Fresnel tracer used for two-dimensional in-process micromeasurements", Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); https://doi.org/10.1117/12.334328

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KEYWORDS

Diffraction

Sensors

Near field diffraction

Inspection

CCD cameras

Glasses

Edge roughness

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