Visual servoing frameworks for microassembly of hybrid MEMS

Stephen J. Ralis; Barmeshwar Vikramaditya; Bradley J. Nelson

doi:10.1117/12.325749

5 October 1998 Visual servoing frameworks for microassembly of hybrid MEMS

Stephen J. Ralis, Barmeshwar Vikramaditya, Bradley J. Nelson

Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325749
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

In this paper we present a novel visual servoing framework for assembly of hybrid microelectromechanical systems (MEMS). The framework incorporates a supervisory logic-based controller that allows the use of multiple visual sensors in order to execute an assembly task. The introduction of multiple visual sensor arrays allows motion of microassembly tasks to initially be controlled `globally' and then locally using a `high precision' view. We use the technique of depth-from-focus to visually servo along the optical axis. This gives us the ability to perform full 3D micropositioning under visual control. The supervisory logic-based controller selects the relevant sensor to be used at a particular stage in the assembly process, which allows us to take full advantage of the individual sensor's attributes such as field-of-view and resolution. The combination of robust visual tracking and depth estimation within a supervisory control architecture is used to perform high-speed, automatic micro-insertions. We present results for the micro insertion task performed under this framework to demonstrate it's feasibility in assembly of MEMS.

Citation Download Citation

Stephen J. Ralis, Barmeshwar Vikramaditya, and Bradley J. Nelson "Visual servoing frameworks for microassembly of hybrid MEMS", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); https://doi.org/10.1117/12.325749

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