Paper
2 September 1998 Highly sensitive hydrogen sensors using palladium-coated fiber optics with exposed cores and evanescent field interactions
Massood Tabib-Azar, Boonsong Sutapun, Rose Petrick, Alex A. Kazemi
Author Affiliations +
Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324285
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
Here we propose and report a novel fiber optic hydrogen sensor which is constructed by depositing palladium over an exposed core region of a multimode fiber. Since the length, thickness, and composition of the palladium patch can be controlled independently of each other, it is possible to increase the speed of our sensor at lower temperatures while maintaining its sensitivity. This is not possible in so called micromirror sensors due to a restriction imposed on their active area of interaction by the fiber optic cross- sectional area. Micromirror fiber optic sensors, studied in the past, take advantage of the reflection/absorption of a palladium film deposited at the end of a fiber and it is only possible to have one sensor per a fiber optic strand. On the other hand, since many evanescent field-based sensors can be deposited over a single fiber optic strand, multiplexing can be easily accomplished using both time- domain and wavelength-domain methods. Using a 100 angstroms thick palladium with 1.5 cm interaction length, we could detect hydrogen in the 0.2% to 0.6% range with corresponding response times of 30 s to 20 s at room temperature. At -10 degree(s)C, these response times increased by a factor of only 2 which is impressive.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Massood Tabib-Azar, Boonsong Sutapun, Rose Petrick, and Alex A. Kazemi "Highly sensitive hydrogen sensors using palladium-coated fiber optics with exposed cores and evanescent field interactions", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324285
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Cited by 4 scholarly publications and 3 patents.
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KEYWORDS
Fiber optics sensors

Sensors

Fiber optics

Hydrogen

Palladium

Micromirrors

Multimode fibers

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