Optical fiber profilometer with submicronic accuracy

Yasser Alayli; Danping Wang; Marc Bonis

doi:10.1117/12.324423

27 August 1998 Optical fiber profilometer with submicronic accuracy

Yasser Alayli, Danping Wang, Marc Bonis

Proceedings Volume 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II; (1998) https://doi.org/10.1117/12.324423
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

This paper describes the experimental setup, test procedure and data-processing of the new profilometer based on an optical fiber displacement sensor. For performing test procedure this sensor is mounted on a high precision linear stage. The optical fiber probe consists of a bundle of optical fibers in a a star configuration. The linear displacement system is mounted on hydrostatic bearings, the guideways are made from zerodur with a planeity better than 0,25 micrometers . The stage is moved by a friction drive over a distance of 220 mm and controlled by an optical encoder with a resolution of 4 nm. The surface profile of a piece from standard polished stainless steel measured by our profilometer is presented.

Citation Download Citation

Yasser Alayli, Danping Wang, and Marc Bonis "Optical fiber profilometer with submicronic accuracy", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324423

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