Fiber optic displacement sensor

Pepe G. Davis; Jeff Bush; Gregory S. Maurer

doi:10.1117/12.323427

23 September 1998 Fiber optic displacement sensor

Pepe G. Davis, Jeff Bush, Gregory S. Maurer

Proceedings Volume 3489, Fourth Pacific Northwest Fiber Optic Sensor Workshop; (1998) https://doi.org/10.1117/12.323427
Event: Fourth Pacific Northwest Fiber Optic Sensor Workshop, 1998, Troutdale, OR, United States

Abstract

A novel low cost interferometric displacement sensor has been developed which tracks distance from the tip of a fiber optic probe. A unique interrogation technique is used which produces a 32-bit phase word, giving the system a dynamic range greater than 10⁹. Therefore, a displacement resolution of less than 0.01 nm can be achieved with a full range of 6 mm. The measurement range can be extended beyond 10 m by simply adjusting the digital fringe counter and sacrificing resolution yet maintaining the greater than 10⁹ dynamic range. Demodulation rates of 40 kHz have been achieved which facilitates dynamic measurements. Results from an application to hard disk (HD) profilometry are presented.

Citation Download Citation

Pepe G. Davis, Jeff Bush, and Gregory S. Maurer "Fiber optic displacement sensor", Proc. SPIE 3489, Fourth Pacific Northwest Fiber Optic Sensor Workshop, (23 September 1998); https://doi.org/10.1117/12.323427

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