Reactive evaporation technology for fabrication of YBCO wafers for microwave applications

Vladimir C. Matijasevic; Per Slycke

doi:10.1117/12.335875

22 December 1998 Reactive evaporation technology for fabrication of YBCO wafers for microwave applications

Vladimir C. Matijasevic, Per Slycke

Proceedings Volume 3481, Superconducting and Related Oxides: Physics and Nanoengineering III; (1998) https://doi.org/10.1117/12.335875
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

We discuss technology issues in deposition of high temperature superconducting YBCO thin films by reactive evaporation. Several key components are necessary to make this a robust manufacturing process. The oxygen pocket heater is the most significant part and determines most of the repeatability and uniformity issues. Additionally, a reliable and repeatable measurement of the atomic beams is necessary for good control of the cation stoichiometry. Quartz crystal monitors (QCM) are currently used for rate control, although their current implementation limits them to rate control at the level of 5%. A tunable-diode laser sensor has been compared directly against a QCM and demonstrated to agree to 1% of the QCM flux measurements. Because of the ability of these new laser senors to measure the deposition flux in the sample position, they seem the most promising technology for vapor flux measurement and control.

Citation Download Citation

Vladimir C. Matijasevic and Per Slycke "Reactive evaporation technology for fabrication of YBCO wafers for microwave applications", Proc. SPIE 3481, Superconducting and Related Oxides: Physics and Nanoengineering III, (22 December 1998); https://doi.org/10.1117/12.335875

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