Development of a combined optical and x-ray interferometer (COXI) system for nanometrology

Noh Bin Yim; Min Seok Kim; Cheon Il Eom

doi:10.1117/12.316438

6 July 1998 Development of a combined optical and x-ray interferometer (COXI) system for nanometrology

Noh Bin Yim, Min Seok Kim, Cheon Il Eom

Proceedings Volume 3479, Laser Interferometry IX: Applications; (1998) https://doi.org/10.1117/12.316438
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

In the COXI (Combined Optical and X-ray Interferometer) system, optical and x-ray interferometers are combined to provide a means for the calibration of transducers with the traceability to the standards of length in the sub-nanometer region. The COXI mainly comprises a laser interferometer, an x-ray interferometer, and a precision translation stage. The laser interferometer used for the COXI instrument was a Michelson type, differential heterodyne interferometer having common optical path. A monolithic x-ray interferometer was made from a silicon single crystal. We have designed a control procedure to operate the COXI instrument for the calibration of nano-transducers and developed a phase demodulator for use with the laser interferometer. The bandwidth, phase resolution, and the measurement uncertainty of the interferometer were found 1 kHz, 0.01 degree, and 0.1 degree, respectively.

Citation Download Citation

Noh Bin Yim, Min Seok Kim, and Cheon Il Eom "Development of a combined optical and x-ray interferometer (COXI) system for nanometrology", Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); https://doi.org/10.1117/12.316438

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