Active optical metrology: a definition with examples

Wolfgang Osten

doi:10.1117/12.312938

30 June 1998 Active optical metrology: a definition with examples

Wolfgang Osten

Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312938
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper deals with the discussion of several problems in optical metrology which can be solved better by an active approach - the so-called active optical metrology. As an important difference in comparison to classical passive procedures the role of the model of the image formation/measuring process and its implementation into an active controlled feedback loop is analyzed. On example of phase reconstruction from 2D fringe patterns the necessity and the advantages of the active approach are explained first. Finally three examples are given where the solutions of complex measuring problems in HNDT and shape measurement are found by the implementation of active controlled feedback loops.

Citation Download Citation

Wolfgang Osten "Active optical metrology: a definition with examples", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312938

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