R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF: status report

Riccardo Signorato

doi:10.1117/12.331126

13 November 1998 R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF: status report

Riccardo Signorato

Proceedings Volume 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications; (1998) https://doi.org/10.1117/12.331126
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper gives an overview of the current performances of the ESRF multi-segmented piezoelectric bimorph mirrors. These devices effectively combine the possibility of varying dynamically the average spherical bending radius with the capability of acting locally on the reflecting surface shape. A first generation consisting of two prototypes was completely characterized in the ESRF metrology laboratory and the mirrors are installed and fully operational on the ID26 and ID32 beamlines since October 1997. Results obtained during the characterization and the commissioning of these devices are presented. A second generation prototype mirror has been designed, manufactured, tested in the ESRF meteorology laboratory, installed and commissioned at ID26 in 1998. This last mirror exhibits sub- (mu) rad residual slope error rms in its central portion, 1 angstrom rms averaged microroughness a d can routinely achieve a vertical beam size as small as 7 micrometers FWHM at a focal distance of almost 3 m.

Citation Download Citation

Riccardo Signorato "R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF: status report", Proc. SPIE 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications, (13 November 1998); https://doi.org/10.1117/12.331126

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