X-ray micromachining with a laser-plasma source at 1-nm wavelength

I. C. Edmond Turcu; Chris M. Mann; Sung W. Moon; B. J. Maddison; Ric M. Allott; Nicola Lisi; Syed Ejazu Huq; Nam Seong Kim

doi:10.1117/12.312747

2 July 1998 X-ray micromachining with a laser-plasma source at 1-nm wavelength

I. C. Edmond Turcu, Chris M. Mann, Sung W. Moon, B. J. Maddison, Ric M. Allott, Nicola Lisi, Syed Ejazu Huq, Nam Seong Kim

Author Affiliations +

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312747
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

A picosecond excimer laser-plasma source has been constructed which generates an x-ray average power of 2.2 Watt and 1.4 Watt at the wavelengths required for proximity x-ray lithography: 1.4 nm (steel target) and 1 nm (copper target), respectively. The plasma source could be scaled to the 50 - 75 W x-ray average power required for industrial lithographic production by scaling the total average power of the commercial excimer laser system up to 1 kW. The 1 nm x-ray source is used to micromachine a 2.5 THz microwave waveguide-cavity package with a 48 micrometers deep, 3D structure, using the LIGA technique.

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I. C. Edmond Turcu, Chris M. Mann, Sung W. Moon, B. J. Maddison, Ric M. Allott, Nicola Lisi, Syed Ejazu Huq, and Nam Seong Kim "X-ray micromachining with a laser-plasma source at 1-nm wavelength", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312747

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