Excimer formation using low-energy electron-beam excitation

Andreas Ulrich; Jochen Wieser; Daniel E. Murnick

doi:10.1117/12.311957

29 June 1998 Excimer formation using low-energy electron-beam excitation

Andreas Ulrich, Jochen Wieser, Daniel E. Murnick

Proceedings Volume 3403, International Conference on Atomic and Molecular Pulsed Lasers II; (1998) https://doi.org/10.1117/12.311957
Event: International Conference on Atomic and Molecular Pulsed Lasers, 1997, Tomsk, Russian Federation

Abstract

Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiN_x ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

Citation Download Citation

Andreas Ulrich, Jochen Wieser, and Daniel E. Murnick "Excimer formation using low-energy electron-beam excitation", Proc. SPIE 3403, International Conference on Atomic and Molecular Pulsed Lasers II, (29 June 1998); https://doi.org/10.1117/12.311957

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