Influence of aberration on performance during use of resolution enhancement technology

Kouichirou Tsujita; Junjiro Sakai; Akihiro Nakae; Shuji Nakao; Wataru Wakamiya

doi:10.1117/12.310820

29 June 1998 Influence of aberration on performance during use of resolution enhancement technology

Kouichirou Tsujita, Junjiro Sakai, Akihiro Nakae, Shuji Nakao, Wataru Wakamiya

Proceedings Volume 3334, Optical Microlithography XI; (1998) https://doi.org/10.1117/12.310820
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

We have investigated the influence of a spherical aberration on the printing characteristics with modified illumination. At first, we have developed a simple method for measuring the aberration function with an alternating phase shift mask (PSM), and have measured that in the projection optics of a commercially available KrF stepper. Then the anomalous phenomena observed in the printing with modified illumination are examined with the simulated aerial images with the measured spherical aberration. As a result, we found good coincidence between the simulated images and the anomalies. In conclusion, the origin of the anomalies is ascribed to the spherical aberration in the projection optics.

Citation Download Citation

Kouichirou Tsujita, Junjiro Sakai, Akihiro Nakae, Shuji Nakao, and Wataru Wakamiya "Influence of aberration on performance during use of resolution enhancement technology", Proc. SPIE 3334, Optical Microlithography XI, (29 June 1998); https://doi.org/10.1117/12.310820

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