Monitoring and controlling synthesis of bottom antireflective coating materials by in-situ FT-IR technique

Shuji Ding; Jianhui Shan; Dinesh N. Khanna

doi:10.1117/12.312481

29 June 1998 Monitoring and controlling synthesis of bottom antireflective coating materials by in-situ FT-IR technique

Shuji Ding, Jianhui Shan, Dinesh N. Khanna

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312481
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

A number of polymeric azo dyes was synthesized in our laboratories in the course of developing and studying i-line bottom antireflective coating materials. The key step in the synthesis involved formation of a diazonium salt intermediate which is a highly energetic species and can quickly convert to a couple of by-products, depending on the reaction medium such as solvent, temperature, time, and acidity. It is important to understand the mechanistic insight and compositional changes during the course of the reaction. ASi ReactIR^TM 1000 reaction analysis system was used as the on-line monitor to follow such complicate process. By using this technique, we were able to obtain high quality kinetic data for thermal stability study of the intermediate, gained good understanding of reaction mechanism, optimized the synthesis process effectively, and achieved good control of reaction yield. The in-situ FT-IR technique proved to be a powerful tool for monitoring and controlling such a process. The highly absorptive polymers synthesized by the optimized process showed good consistency of the overall lithographic performance.

Citation Download Citation

Shuji Ding, Jianhui Shan, and Dinesh N. Khanna "Monitoring and controlling synthesis of bottom antireflective coating materials by in-situ FT-IR technique", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312481

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