400- and 750-MHz one- and two-dimensional nuclear magnetic resonance spectra of x-ray-degraded poly(methyl methacrylate): comparison with UV-degraded material

Edward E. Waali; John D. Scott; Olga Vladimirsky; Yuli Vladimirsky; K. M. Hayataka; J. Michael Klopf

doi:10.1117/12.309609

5 June 1998 400- and 750-MHz one- and two-dimensional nuclear magnetic resonance spectra of x-ray-degraded poly(methyl methacrylate): comparison with UV-degraded material

Edward E. Waali, John D. Scott, Olga Vladimirsky, Yuli Vladimirsky, K. M. Hayataka, J. Michael Klopf

Author Affiliations +

Proceedings Volume 3331, Emerging Lithographic Technologies II; (1998) https://doi.org/10.1117/12.309609
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

Nuclear magnetic resonance spectroscopy (NMR) has been sued for he identification of several products from syndiotactic- rich poly(methyl methacrylate) (PMMA) sheet exposed to x-ray and UV irradiation. Two chain-scission products and two chain-intact products were observed using 1D and 2D NMR spectroscopy. The 750 and 400 MHz 1D hydrogen (¹H) spectrum and the 2D ¹H, ¹H-COSY, ¹HMQC¹ and HMBC¹ spectra permitted the assignment of many hydrogen and carbon NMR signals for the four products which are still polymeric. Additional signals were observed for minor stereoisomers. Methyl formate, s small molecular product, was found in both the x-ray and UV degradations. Acetaldehyde was also observed from x-ray exposure but not UV exposure. Important results from this work are well- resolved chemical 'fingerprints' for x-ray and UV exposed PMMA.

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Edward E. Waali, John D. Scott, Olga Vladimirsky, Yuli Vladimirsky, K. M. Hayataka, and J. Michael Klopf "400- and 750-MHz one- and two-dimensional nuclear magnetic resonance spectra of x-ray-degraded poly(methyl methacrylate): comparison with UV-degraded material", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309609

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