Paper
20 July 1998 Performance optimization of a Love wave device for biosensing
Bernhard Jakoby, G. W. Lubking, Michael J. Vellekoop
Author Affiliations +
Abstract
Microacoustic sensors feature a number of benefits like real-time electronic readout, small size, robustness, high sensitivity, and cost-effective fabrication. For liquid sensing applications Love wave devices utilizing a surface bound shear mode are particularly well-suited. In this paper we discuss the crucial issues in the design of a Love wave device for the utilization in a smart liquid-sensor system, where special attention is paid to the interaction of the sensing device with the associated electronics and the influence of the adsorbing film used for biosensing applications.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernhard Jakoby, G. W. Lubking, and Michael J. Vellekoop "Performance optimization of a Love wave device for biosensing", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320172
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KEYWORDS
Liquids

Tin

Acoustics

Sensors

Biosensing

Capacitance

Ions

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