Dynamical finite element models for MEMS and smart structures

Vasundara V. Varadan; Young-Hun Lim; Vijay K. Varadan

doi:10.1117/12.305618

16 April 1998 Dynamical finite element models for MEMS and smart structures

Vasundara V. Varadan, Young-Hun Lim, Vijay K. Varadan

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305618
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Advances in application of MEMS to smart structures can be accelerated by implementation of CAD tools, optimization and parametric studies which will result in rapid prototyping and virtual design. Dynamical finite element models are ideally suited to capture the complexity of active sensor and actuator devices that make up a smart structure. MEMS are miniature electro-mechanical devices that can also be modeled by FE analysis. Recent advances in FE analysis allows us to zoom in and magnify the mesh at desired locations while maintaining the larger structural model. Thus we can achieve economy in computational time without sacrificing accuracy. In designing a smart structure, the active devices whether they be MEMS or larger devices must be modeled in detail, with special attention to the coupled fields present in these devices (electric, magnetic, elastic, thermal, etc.) and the accompanying additional boundary conditions. Lumped parameter approximations are usually insufficient to describe the observed behavior of these devices. During optimization procedures, one must have the ability to move these devices on the structure and hence one needs automatic remeshing procedures. This paper will review finite element models for smart structures as they have evolved over the last decade and summarize some of the more recent advances for dynamical modeling of MEMS and smart structures including closed loop modeling and design optimization. Practical examples as well as comparisons and code validation with experimental results will be provided wherever possible.

Citation Download Citation

Vasundara V. Varadan, Young-Hun Lim, and Vijay K. Varadan "Dynamical finite element models for MEMS and smart structures", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305618

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available